Etching Bay
- Classification: ISO 7
- Research activities: Wet and dry etching operations and nanoscale fabrication.
- Equipment: Ion miller, RIE, critical point dryer, chemical wet benches, ALD.
- Lighting: White
Equipamiento
State-of-the-art equipment, including electron and scanning-tunneling microscopes, as well as other nanofabrication and characterization tools, are managed by specialists and used by researchers from a wide variety of fields.
Equipamiento e infraestructura
Una infraestructura única de 6 200m2 con una sala blanca de 300m2 y 15 laboratorios ultrasensibles con equipamiento de vanguardia.
Contacto
Ralph Gay
Cleanroom Manager
+34 943574015
r.gay@nanogune.eu